Deposition of MoSe2 flakes using cyclic selenides

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CHARVOT Jaroslav ZAZPE Raul KRUMPOLEC Richard RODRIGUEZ-PEREIRA Jhonatan PAVLIŇÁK David POKORNÝ Daniel KLIKAR Milan JELÍNKOVÁ Veronika MACAK Jan M. BUREŠ Filip

Rok publikování 2021
Druh Článek v odborném periodiku
Časopis / Zdroj RSC Advances
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c
Doi http://dx.doi.org/10.1039/D0RA10239C
Klíčová slova atomic layer deposition; ALD precursors; cyclic selenides; nanostructures; 2D flakes
Popis The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl5 affording MoSe2. A thorough characterization of the as-deposited 2D MoSe2 flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe2.
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