Comparison of HMDSO and HMDSZ thin films growth under dusty plasma conditions

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Publikace nespadá pod Lékařskou fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.

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PŘIBYL Roman KELAROVÁ Štěpánka ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma

Rok publikování 2021
Druh Článek ve sborníku
Konference 12th International Conference on Nanomaterials - Research and Application, NANOCON 2020
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://www.confer.cz/nanocon/2020/3778-comparison-of-hmdso-and-hmdsz-thin-films-growth-under-dusty-plasma-conditions
Doi http://dx.doi.org/10.37904/nanocon.2020.3778
Klíčová slova Thin films; PECVD; dusty plasma; surface properties
Popis The present study is focused on the preparation of thin films by plasma enhanced chemical vapor deposition (PEDCV) in capacitively coupled plasma (CCP). Thin films were deposited from a mixture of oxygen and hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ). Both monomers are well known and enable to prepare films with excellent properties such as high hardness, good abrasion resistance, hydrophobicity, and antibacterial properties. Also, these monomers are known for the creation of complex structures in plasma. This phenomenon is so-called dusty plasma. The main aim of the present work was to prepare a comparative study on the dust formation in both monomers. Complex study of surface and mechanical properties and chemical composition was done by a wide range of analytical instruments such as atomic force microscopy (AFM), nanoindentation technique, confocal microscopy, infrared spectroscopy with Fourier transformation (FTIR), stylus profilometer, and surface energy evaluation system (SEE system).
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