Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

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Authors	KELAR Lukáš BURŠÍKOVÁ Vilma BOCHNÍČEK Zdeněk
Year of publication	2008
Type	Article in Proceedings
Conference	CESPC II - Book of extended abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	carbon films ;PECVD
Description	Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD
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