Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates

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Authors	STOICA Adrian BURŠÍKOVÁ Vilma KELAR Lukáš NOVOTNÝ Tomáš
Year of publication	2009
Type	Article in Proceedings
Conference	Frontiers in Low Temperature Plasma Diagnostic 8
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Mechanical Properties; Diamond-like Carbon; Coatings; Polymer Substrates
Description	We focused our work on optimizing the deposition parametres to improve the coatings adhesion to the polymer surface. Hzdrogenate amorphous carbon (a-C:H) and nitrogen incorporated hzdrogenated amorphous carbon (a-C:H:N) films were deposited on polycarbonate, glass reinforced PPS, and BMC substrates by r.f. plasma enhanced chemical vapor deposition (PECVD) A mixture of hexamethyldisiloxane (HMDSO) and CH4/N2/H2 gases was utilized to reduce the internal compressive stress of the deposited films.
Related projects:	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Nanometrologie využívající metod rastrovací sondové mikroskopie