Higher harmonic frequencies in capacitive discharges

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Authors	DVOŘÁK Pavel VAŠINA Petr BURŠÍKOVÁ Vilma ŽEMLIČKA Radek
Year of publication	2010
Type	Article in Proceedings
Conference	63rd GEC and 7th ICRP - Conference Proceedings
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	higher harmonic frequencies; electron concentration; plasma
Description	Dependence of amplitudes of higher harmonic frequencies on electron concentration.
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