Morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process

Warning

This publication doesn't include Faculty of Medicine. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	VAŠINA Petr SOUČEK Pavel SCHMIDTOVÁ Tereza BURŠÍKOVÁ Vilma SCHÄFER Jan
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This paper presents the morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Plazmochemické procesy a jejich technologické aplikace CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy